The Versa
3D™ DualBeam™ system provides high-resolution, three-dimensional (3D) imaging
and analysis on a wide range of sample types. It’s highly configurable platform
allows customers to adapt the system’s capabilities to their specific
requirements. It is available with either high-vacuum only or high- and low-vacuum
electron imaging hardware. Low-vacuum electron imaging capabilities allow the
system to accommodate contaminating or outgassing samples that are incompatible
with high-vacuum operation. Low-vacuum also provides the ability to compensate
for charge build up in non-conductive samples even at the high currents required
for analysis techniques, such as energy dispersive (X-ray) spectroscopy (EDS)
and electron backscatter diffraction (EBSD). The high-performance platform can
also be configured with the company’s low-vacuum capabilities and even
environmental scanning electron microscopy (ESEM) for in situ analysis.
Advanced SEM scanning and FIB patterning yield powerful imaging and milling
performance. New features, such as the company’s SmartSCAN™ and Drift Corrected
Frame Integration (DCFI), facilitate electron beam imaging of sample types with
a range of different properties. Advanced backscattered electron, as well as
secondary electron and ion detectors, collect a wide variety of topographic,
elemental and compositional information “from every angle.” The combination of
the latest AutoSlice & View™ G3 software option, the versatile electron
imaging hardware and high throughput ion column enables researchers to
capitalize on the charge balancing capabilities of ions and electrons. Milling
(with positive ions) and imaging or drift suppression (with electrons) provides
a unique synergy for automation of 3D serial slicing, imaging and analysis of
both electrically conductive and non-conductive samples. When combined with EDS
or EBSD, EDS3™ and EBS3™ software options can also be used to reconstruct
elemental maps or crystallographic orientation data in 3D. The system addresses
the diverse needs in materials research, life sciences, electronics and
geosciences.
FEI Co.,
Hillsboro, Oregon 97124. www.fei.com or call
503-726-7500